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Thermal oxidation
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#	Item
21	Destabilization of methane hydrates: a risk analysis A Report Prepared for the German Advisory Council on Global Change David Archer Department of the Geophysical Sciences Add to Reading List Source URL: www.wbgu.de Language: English - Date: 2010-12-08 07:36:25 Climatology Anaerobic digestion Atmosphere Greenhouse gases Clathrate hydrates Atmospheric methane Clathrate gun hypothesis Anaerobic oxidation of methane Paleocene–Eocene Thermal Maximum Chemistry Methane Environment
22	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 3, JUNE[removed]Wafer-Level Packaging Based on Uniquely Orienting Self-Assembly (The DUO-SPASS Processes) Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2006-11-13 22:12:11 Technology Wafer Etching Deep reactive-ion etching Microelectromechanical systems Three-dimensional integrated circuit Thermal oxidation Photolithography LIGA Materials science Microtechnology Semiconductor device fabrication
23	Microsoft Word - MEMS05_Fang.doc Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2004-10-27 21:09:24 Microtechnology Silicon Microelectromechanical systems Wafer Flip chip Hydrophobe Thermal oxidation Three-dimensional integrated circuit Properties of water Chemistry Semiconductor device fabrication Materials science
24	A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding Add to Reading List Source URL: deepblue.lib.umich.edu Language: English - Date: 2013-09-17 15:11:17 Technology Microelectromechanical systems Etching Wafer Microfabrication Deep reactive-ion etching Chemical-mechanical planarization Thermal oxidation Silicon on insulator Semiconductor device fabrication Materials science Microtechnology
25	PDF Document Add to Reading List Source URL: wwwzb1.fz-juelich.de Language: English - Date: 2009-04-16 04:40:12 Chemical engineering Thermal barrier coating Thermal protection Coating Superalloy Thermal oxidation Materials science Chemistry Thin film deposition
26	Levitech ready for introduction of Al2O3 atomic layer deposition system For a long time, the solar industry did not dare dream of atomic layer deposition (ALD). Considering the relative slowness of the process, the secto Add to Reading List Source URL: www.levitech.nl Language: English - Date: 2010-09-09 02:35:40 Semiconductor devices Microtechnology Energy conversion Solar cells Wafer Rapid thermal processing Integrated circuit Ultra-high-purity steam for oxidation and annealing Semiconductor device fabrication Technology Energy
27	Microsoft Word[removed]European Solar Cell maker selects Levitrack ALD system.docx Add to Reading List Source URL: www.levitech.nl Language: English - Date: 2011-05-10 11:17:45 Energy Chemistry Atomic layer deposition Energy conversion Rapid thermal processing Solar cell Layer Ultra-high-purity steam for oxidation and annealing Semiconductor device fabrication Thin film deposition Technology
28	Rapid Thermal Oxidation (RTO) Levitor for: • Dry Oxidation (100% O2) • Diluted Oxidation[removed]% O2) • Anneal under Oxygen[removed]% O2) Add to Reading List Source URL: www.levitech.nl - Date: 2010-06-22 07:24:39
29	SEMI-FINISHED BONDED SUBSTRATES: SOI-WAFER (SILICON ON INSULATOR) 1 Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 09:59:22 Semiconductor device fabrication Electronics manufacturing Wafer bonding Wafer Direct bonding Silicon on insulator Thermal oxidation Etching Eutectic bonding Microtechnology Electronics Materials science
30	3D INTEGRATION: TSV PROCESSES AND WAFER THINNING 1 Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-15 16:05:10 Technology Deep reactive-ion etching Microelectromechanical systems Etching Wafer Applied Materials Thermal oxidation Back end of line Photoresist Semiconductor device fabrication Materials science Microtechnology

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